The entire process is extremely complicated, a relatively simplistic way of the process is for EUV (Extremely Ultra Violent) Lithography is you take particals for pure tin and you vaporizer it which produces UV light that’s in the ballpark of 5nm
You then take that UV light and reflect it on a wafer, but you need to be extremely accurate. The mirrors are about $100k each and requires about 20 and need to be extremely flat, i.e if the mirror was the size of the US the tallest bump would be about 5mm tall
A wafer is a thin slice of silica that then the light then carves out
If you want a more detailed video[ this one](https://youtu.be/RwW0Yfy0oCw) does a good job at it
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