Carefully created techniques. Eg to create a flat surface you use three plates. Running again each other to smooth them down and using blue dye between them to highlight high and low spots.
Three are needed because with two they’d mirror imperfections into each other. With three they all average out flat.
Wikipedia explains better: https://en.m.wikipedia.org/wiki/Surface_plate
But basically with a lot of care, and careful technique you can create continually improving precision.
Original paper: https://books.google.com/books?id=wL1ZAAAAcAAJ&pg=RA1-PA192#v=onepage&q&f=false
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