Hello, im a physicist who’s worked in semiconductor manufacturing for 10 years. The basic problem you are highlighting is: how do we draw really small lines?
Simple terms: light wavelengths are small for UV light. They get smaller for even higher frequency. We also use some tricks like using steppers rather than scanners. You can get even small lines by using high energy electrons.
Its all about finding the right chemical that polymerizes by being exposed to the right frequency of light.
TLDR: it ain’t easy, but we use high energy light to make tiny lines.
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