Photolithography is the name of the tech, they use special photo sensitive materials, they lay down different types of silicon then cover in a ‘mask’ they then expose the mask. They have a big light, and a template (like the pattern drawn on a large scale) then focused down to the small scale needed. Then the bits that get exposed are washed off and then an acid is used to dissolve the silicon away. They can then deposit more layers of materials up and up. It’s a very powerful process
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