The transistors on chips are not built on, they are built in so to say. They get chemically graftet directly into silicium with etching processes and particle injection. Thats how its possible to work on such a small scale. The Princinple stays mostly the same wether you build 100 or 100.000.000 transistors. The size is of course much trickier when it gets smaller. They use optics to project a large matrix onto much smaller size (not visible light though)
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